英语翻译The composition and PDMS pump membrane mechanical proper

英语翻译
The composition and PDMS pump membrane mechanical property.suitable (tensile strength for 5.5 N/mm,XiaoShi hardness for 38,elongation rate can reach 350 %,can withstand the shear strength per mm) more than 12 N.And the elastic modulus is very low,only 0.75 MPa (Si elastic modulus of 150 GPa),thus allowing pump membrane in vertical direction has greater displacement,and the processing technology is simple and has a long service life.Moreover,Thin,transparent and PDMS colorless optical properties is good,can satisfy the biochemical tests of optical detection methods of optical characteristics of [1].And PDMS film,the chemical and physical properties of biological compatibility,good stability so that it can be used in chemical,biological and chemical sensors,separation,nucleic acids and environmental monitoring and analysis,etc.
Electromagnetic syringe pumps mainly PDMS film consists of three parts:the elastic pump PDMS constitute nd-fe-b thin film,and the lower surface coil block.When the plane coil tube.as the torque-current forms of alternating current,the coil produces alternating magnetic field,thin pieces of nd-fe-b magnetic field and form,interaction,and PDMS film reciprocating motion of the pump chamber volume changes caused by,and control of fluid and trace.
Pump film-forming USES is the foundation of silica superfine processing work [3].First,take a two-sided oxidation of < > 100 of silicon wafer (figure 2a),the rejection,before baking,photolithography,development process as shown in figure 2b get the masking window after baking,with strong membrane hydrofluoric acid corrosion off the window,silicon substrate sio2 (2c).Remove silicon surface with acetone,the rest of the photoresist silicon in 10%koh solution,corrosion and 50 mu m thick (figure 2d),remove.Then the spin in silicon coated 40 muon m thick film (PDMS 2e),vacuum drying oven remove mixing the bubbles.PDMS In order to prevent and PDMS after curing temperature for the solution of KOH PDMS film,again add KOHAgain,before the solution in 10%koh membrane surface protection to pump.Protection method is in after curing of the sputtering film PDMS isolation layer,prevent PDMS and direct contact layer,and then spin coating layer again (figure 2f).Cover after curing,again add KOH solution in the rest of the silicon substrate corrosion off (2g),at this time,window place only PDMS film.After cleaning in deionized water,remove stripping layer and isolation layer (diagram 2h).Finally,the property of powder with thin pieces in the pump film binder PDMS 2i (FIG).At the bottom of the permanent magnet pump membrane by nd-fe-b powder,chip processing,low cost,simple,suitable for mass production.Figure 3 for making good pump membrane pictures.
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膜的组成和PDMS泵机械性能优良.(抗拉强度为5.5 N /毫米,消食硬度为38岁,延伸率达到350 %,能承受剪切强度每毫米)超过12 .和弹性模量很低,仅为0.75 MPa(Si弹性模量,从而使150)在垂直方向泵膜具有更大的位移、加工工艺简单,使用寿命长.另外,薄透明无色光学特性和PDMS的好,可以满足生化试验检测方法的特点,光纤的光学[1].和PDMS膜、化学和物理性能的生物相容性、稳定性好,这样它可以用于化学、生物和化学传感器、分离、核酸及环境监测及分析方法等.
电磁微泵主要PDMS电影是由三部分组成:弹性泵PDMS钕铁硼薄膜,和较低的线圈.当飞机线圈中通入方波形式的交流电,线圈产生交变磁场、薄件钕铁硼磁性能量场和形体、互动和PDMS电影往复运动的泵腔体积变化引起的流体,控制和跟踪.
可以用泵的基础是白炭黑超微处理工作[3].首先,用一块双面< >百氧化硅晶片(图2),拒绝,烤前、蚀刻、发展过程中,如图再得到掩蔽窗口后,具有较强的氢氟酸腐蚀膜窗、矽sio2(2c).除硅表面和丙酮,其余的光刻胶硅的解决方案,抗腐蚀,koh 50亩米(图2d),然后拆卸.然后旋转在硅涂层40μ子米厚膜(PDMS)、真空干燥箱2e去除混合的泡沫.为了防止和PDMS PDMS固化后温度以氢氧化钾、再加KOHAgain PDMS电影之前,KOH固定在膜表面保护方案,泵.保护方法是在固化后的溅射膜,防止PDMS PDMS隔离层,直接接触层,然后再涂层旋转(图号2楼).盖固化后,再加KOH溶液中,其余的矽基板腐蚀掉(2g),就在这个时候,窗处只有PDMS的电影.在去离子水清洗后,清除剥皮层和隔离层(图2h).最后,对粉末和薄片在泵薄膜(PDMS)我(图).在底部的钕铁硼永磁泵膜由粉、芯片处理、低成本的、简单的、适合批量生产.图3制作好泵的图画